INSPECTION STANDARD SETTING SYSTEM, INSPECTION STANDARD SETTING METHOD AND PROCESS INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technique for properly setting an inspection standard for detecting a defective sign in process inspection.

SOLUTION: A data processor is constituted so that the feature quantities extracted with respect to the respective inspection items of process inspection and the judge result of final inspection are accumulated in a memory means, the separation degree of the distribution of the feature quantities of a product group judged to be good product group in final inspection and the distribution of the feature quantities of a product group judged to be a defective product group in final inspection is calculated from the data of a plurality of products accumulated in the memory means at every inspection item or at every combination of the inspection items, an inspection item for the resetting of the inspection standard is selected from the inspection items or the combination of the inspection items on the basis of the magnitude of the separation degree and a new inspection standard is set with respect to the selected inspection item.

COPYRIGHT: (C)2007,JPO&INPIT