Substrate processing and method of manufacturing device

摘要

A substrate processor enables realization of a proper process by combining advantages of a remote plasma and a plasma generated in an entire processing chamber. The substrate processor includes a conductive member ( 10 ) which is installed surrounding a processing space ( 1 ) and grounded to the earth and a pair of electrodes ( 4 ) installed inside the conductive member ( 10 ). A primary coil of an insularing transformer ( 7 ) is connected to a high-frequency power supply unit ( 14 ) and a secondary coil is connected to the electrodes ( 4 ). A switch ( 13 ) is connected to the connection line connecting the secondary coil to the electrodes ( 4 ). By setting up/cutting off the connection of the line to the earth with use of the switch ( 13 ), the region where the plasma is generated in the processing space ( 1 ) can be changed.