DETECTING SENSOR OF A DROP OF WATER CONDENSATION

摘要

A sensor for detecting a condensate drop is provided to promptly detect a condensed water drop by detecting the change of a capacitance when the water drop is formed or dropped in the interior of a well. In a sensor for detecting a condensate drop, a plurality of wells(16) are formed in a silicon substrate by inclination etching. A silicon oxide film is formed on the upper surface of the silicon substrate and on inclined surfaces of the plurality of wells. Thin film electrodes are formed on corresponding inclined surfaces of the inclined surfaces of the wells. An array thin film metal is formed so that the thin film electrode is connected in parallel. External leading electrodes are formed at both ends of the array thin film metal.