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发明名称
Verfahren zur Herstellung duenner Schichten aus Siliciummonoxyd durch Aufdampfen
摘要
申请公布号
DE1200404(B)
申请公布日期
1965.09.09
申请号
DE1963S088495
申请日期
1963.11.29
申请人
SIEMENS & HALSKE AKTIENGESELLSCHAFT
发明人
MIEG DR. PETER;MAYER DIPL.-PHYS. GERHARD
分类号
C23C14/10;H01B3/10
主分类号
C23C14/10
代理机构
代理人
主权项
地址
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