发明名称 |
Probe card covering system and method |
摘要 |
The present invention discloses a cover over electrical contacts of a probe card used in testing die on a wafer. A testing machine is disclosed as having the covered probe card therein. Various mechanisms for uncovering the electrical contacts while it is located in the tester machine are disclosed.
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申请公布号 |
US7128587(B2) |
申请公布日期 |
2006.10.31 |
申请号 |
US20050264948 |
申请日期 |
2005.11.01 |
申请人 |
FORMFACTOR, INC. |
发明人 |
ELDRIDGE BENJAMIN N.;REYNOLDS CARL V. |
分类号 |
G01R1/06;H01R13/44;G01R31/28;H01L21/66 |
主分类号 |
G01R1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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