| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of heating and cooling a color filter substrate which does not cause cracking on transparent conductive film of a part of color filter substrate corresponding to opening of a hot plate or a cool plate, and coated film on the transparent conductive film. <P>SOLUTION: (1) For heating by means of a hot plate, when a lift pin is lowered, a color filter substrate is placed on the hot plate and is sucked and the head part of the lift pin is located on a position lower than the upper surface of the hot plate, air sucking is started such that the color filter substrate is sucked onto the hot plate. In a case (2) of the cooling by means of a cool plate, when the lift pin is lowered, the color filter substrate is placed on the cool plate and is sucked and the head part of the lift pin is located on a position lower than the upper surface of the cool plate, air sucking is started such that the color filter substrate is sucked onto the cool plate. <P>COPYRIGHT: (C)2007,JPO&INPIT |
