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发明名称
Method for manufacturing semiconductor device having trench type metal-insulator-metal capacitor
摘要
申请公布号
KR100630689(B1)
申请公布日期
2006.10.02
申请号
KR20040052971
申请日期
2004.07.08
申请人
发明人
分类号
H01L27/108
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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