| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a carbon nano-structural material, irradiating a substrate where a carbon coating is formed on the surface thereof with ions to make a carbon nano-structural material to grow on the tops of micro-projections formed on the surface of the substrate one by one, whereby when the nano-structural materials are obtained separately in the non-dense state on the substrate, a suitable carbon coating to be formed on the surface of the substrate is selected so that the nano-structural materials can be made to grow in the non-dense state by irradiation with ions with a low current density. SOLUTION: A solution of acrylonitrile polymer is coated as an organic polymer solution on the surface of the substrate, subsequently the substrate is burnt at a temperature of 200 to 400°C in an atmosphere containing oxygen to perform preliminary oxidation treatment for the coating of acrylonitrile polymer, and subsequently the substrate is burnt at a temperature of 1000°C in an inert atmosphere to perform the carbonizing treatment for the coating, thereby forming a carbon coating on the surface of the substrate. When the ion irradiation is performed on the surface of the substrate with 70μA/cm<SP>2</SP>for 100 minutes (embodiment 1), carbon nano-fibers can be obtained in the separate state. COPYRIGHT: (C)2006,JPO&NCIPI
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