发明名称 ORGANIC FERROELECTRIC MEMORY AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an organic ferroelectric memory manufactured by a simple process, and to provide its manufacturing method. SOLUTION: The organic ferroelectric memory 100 comprises a thin film transistor 90 of simple matrix type structure having an organic semiconductor layer 40, an interlayer insulation film 70 formed above the thin film transistor 40, a ferroelectric capacitor 56 formed above the interlayer insulation film 70 while having a lower electrode 52, an organic ferroelectric layer 50 and an upper electrode 54, and a contact layer 62 penetrating the interlayer insulation film 70 and connecting the ferroelectric capacitor 56 and the thin film transistor 90 electrically. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006253475(A) 申请公布日期 2006.09.21
申请号 JP20050069270 申请日期 2005.03.11
申请人 SEIKO EPSON CORP 发明人 KARASAWA JUNICHI;HIRAI EIKI
分类号 H01L27/105;H01L21/8246;H01L27/28;H01L29/786;H01L51/05 主分类号 H01L27/105
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