| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of easily setting tube voltage and tube current for an unknown specimen. SOLUTION: The X-ray inspection device 1 comprises an X-ray tube 11, an X-ray control unit 15 for controlling the tube voltage and tube current of the X-ray tube 11, and an X-ray detector 12 for detecting X-rays 22 having permeated the specimen 21. The X-ray inspection device 1 also comprises an automatically setting unit 13b of the tube voltage and tube current that calculates the contrast/noise ratio, namely the ratio of the contrast to the noise of a permeation image based on the permeation image of the specimen detected by the X-ray detector 12, determines optimum values of the tube voltage and tube current of the X-ray tube 11 based on the contrast/noise ratio, and outputs it to the X-ray control unit 15. COPYRIGHT: (C)2006,JPO&NCIPI
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