METHOD OF SETTING THRESHOLD FOR BLOT DEFECT DETECTION, AND METHOD AND DEVICE OF INSPECTING BLOT DEFECT

摘要

PROBLEM TO BE SOLVED: To provide a method of setting a threshold for blot defect detection to simply set a threshold for detecting a blot defect by means of a plurality of inspection devices under a unified determination.

SOLUTION: An image of a model defect serving as a reference for detecting a blot defect is prepared in a model defect preparation process ST100. Model defect reproduction information for reproducing the image of the model defect prepared in the preparation process ST100 is stored in a model defect reproduction information storage process ST200. The model defect is displayed by causing a drive means of an inspection device to reproduce the model defect in a model defect display process. Image data obtained by imaging the reproduced model defect by an imaging means of the inspection device are acquired in an image processing process. A parameter for detecting a blot defect is calculated by image-processing the image data by an image processing means in an image processing process. The parameter calculated in the processing process is set as a threshold for blot defect detection in a threshold setting process.

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