| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a position detection method detectable of a mark position without difficulty even when a plurality of alignment mark exist in a detection view field of an imaging optical system. <P>SOLUTION: In the position detection method, for detecting the position of the alignment mark AM on a substrate W as shown in Fig. 5, the alignment mark is used for detecting the coordinates as mark positions in the aligned direction from the position relation in the aligned direction of line part L, L formed with a line and space pattern. A plurality of alignment marks AM, AM line with a specific interval in the line part aligned direction. When this is taken in the detection view field 35f of the imaging optical system 35, coordinates in the direction perpendicular to the aligned direction of the line part L are obtained to detect the position of the mark from the position relationship of both ends YT, YB of the line part L of one of the alignment marks AM. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
