SUBSTRATE PROCESSING DEVICE AND METHOD OF PRODUCING SUBSTRATES

摘要

An object of the invention is to provide a substrate processing device capable of automatically recovering a normal-state substrate without human intervention. A substrate processing device comprises a substrate holder (26) for holding substrates (12) in multi-stage, and a substrate transfer machine (34) for transferring substrates (12) to the substrate holder (26), and the substrate holding state of the substrate holder (26) is detected by a detecting section (60). The detecting section (60) has photosensors (64a, 64b). A control section (66) is installed. The control section (66) effects such that a detected waveshape from the photosensors (64a, 64b) is compared with a normal waveshape so as to transfer other substrates (12) by the substrate transfer machine (34) than at least those decided to be abnormal.