发明名称 |
Diamond-like coated components in an ion implanterfor reducing x-ray emissions |
摘要 |
A component of an ion implanter (10), and a method of operating same, are provided for reducing the amount of x-rays generated when an ion beam (15) passes there through. In one embodiment, the component comprises an electrode (72) in an ion implanter radio frequency (RF) linear accelerator (linac) (18) that is coated with a material coating (114) having as lesser atomic mass that that of the underlying electrode, such that electrons impacting said coating produce less x-rays than electrons impacting said electrode. The electrode (72) may be made of aluminum, and the coating (114) may be made of a carbon- based material, such as a synthetic diamond or a diamond-like coating (DLC) material. The coating (114) has a thickness of approximately two to ten (2-10) microns ([err]m), and is applied by a chemical vapor deposition (CVD) process.
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申请公布号 |
SG124233(A1) |
申请公布日期 |
2006.08.30 |
申请号 |
SG20000006871 |
申请日期 |
2000.11.28 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
MCINTYRE, EDWARD KIRBY, JR.;ALLEN, ERNEST EVERETT, JR.;JONES MARY ALICE;NAKATSUGAWA TOMOYA |
分类号 |
C23C14/48;H01J37/09;H01J37/317;H01L21/265 |
主分类号 |
C23C14/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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