| 摘要 |
PROBLEM TO BE SOLVED: To effectively suppress minute vibration of a piston generated in a positioning target position neighborhood or the like by a very simple means in a pneumatic cylinder for positioning control. SOLUTION: A minute vibration suppressing mechanism 20 is added to a piston rod 6 of the pneumatic cylinder 1 stopping a piston 5 at a target position by positioning control. The minute vibration suppressing mechanism 20 has a friction member 21 formed by a pair of seal members 21a contacting the piston rod 6, an air reservoir 22 for compressed air supplied to a periphery of the rod 6 is formed by the friction member, and an air passage 23 is provided for carrying out supply and exhaust of the compressed air to the air reservoir 22 for generating sliding friction suppressing the minute vibration with the rod 6 via the friction member 21. COPYRIGHT: (C)2006,JPO&NCIPI
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