发明名称 |
Photoelectric encoder for precise measurements |
摘要 |
A plurality of photodiodes are disposed along a measurement axis on an optical receipt chip of a photoelectric encoder. Formed on each light acceptance surface of these photodiodes is a second optical grating which has more than one light shield portion extending in a "y" direction. Each acceptance surface has a portion that is disposed obliquely relative to the extending direction of the light shield portion.
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申请公布号 |
US7095011(B2) |
申请公布日期 |
2006.08.22 |
申请号 |
US20040846437 |
申请日期 |
2004.05.14 |
申请人 |
MITUTOYO CORPORATION |
发明人 |
KOJIMA KENJI;TAKAHASHI TOMOTAKA |
分类号 |
G01D5/34;G01D5/347;H01L31/12 |
主分类号 |
G01D5/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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