发明名称 Photoelectric encoder for precise measurements
摘要 A plurality of photodiodes are disposed along a measurement axis on an optical receipt chip of a photoelectric encoder. Formed on each light acceptance surface of these photodiodes is a second optical grating which has more than one light shield portion extending in a "y" direction. Each acceptance surface has a portion that is disposed obliquely relative to the extending direction of the light shield portion.
申请公布号 US7095011(B2) 申请公布日期 2006.08.22
申请号 US20040846437 申请日期 2004.05.14
申请人 MITUTOYO CORPORATION 发明人 KOJIMA KENJI;TAKAHASHI TOMOTAKA
分类号 G01D5/34;G01D5/347;H01L31/12 主分类号 G01D5/34
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