| 摘要 |
The present invention provides a sensing device for monitoring temperature and sensor in a semiconductor mold. The sensing device comprises a first and second optical fiber attached therein. A first Bragg grating (FBG) sensor is fabricated in the first optical fiber to measure the pressure parameter of the molten molding material in the mold. A second FBG sensor is fabricated in the second optical fiber to measure the temperature parameter of the molten molding material in the mold.
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