发明名称 |
VERTICAL HEAT TREATMENT DEVICE |
摘要 |
A heat treatment device has a treatment container having an opening in the lower end and capable of receiving inside an object to be treated. The opening is opened and closed by a lid body. A flange is provided at the peripheral edge of the opening, and in the flange is provided a gas introducing section for introducing a gas into the treatment container. The object to be treated received in the treatment container is heated by a heating mechanism. |
申请公布号 |
KR20060090743(A) |
申请公布日期 |
2006.08.16 |
申请号 |
KR20057022868 |
申请日期 |
2005.11.30 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
HONMA MANABU;OHIZUMI YUKIO;NAGATSUKA KEISUKE |
分类号 |
H01L21/22;H01L21/324;C30B31/10;H01L21/31;H01L21/316 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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