发明名称 VERTICAL HEAT TREATMENT DEVICE
摘要 A heat treatment device has a treatment container having an opening in the lower end and capable of receiving inside an object to be treated. The opening is opened and closed by a lid body. A flange is provided at the peripheral edge of the opening, and in the flange is provided a gas introducing section for introducing a gas into the treatment container. The object to be treated received in the treatment container is heated by a heating mechanism.
申请公布号 KR20060090743(A) 申请公布日期 2006.08.16
申请号 KR20057022868 申请日期 2005.11.30
申请人 TOKYO ELECTRON LIMITED 发明人 HONMA MANABU;OHIZUMI YUKIO;NAGATSUKA KEISUKE
分类号 H01L21/22;H01L21/324;C30B31/10;H01L21/31;H01L21/316 主分类号 H01L21/22
代理机构 代理人
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