Local irradiance regulation method for optical system in projection exposure arrangement, involves forming optical path between optical units and determining temperature distribution of irradiated upper surface of object

摘要

The method involves providing optical units between which an optical light path (2) is formed. A measuring object, for partially absorbing the radiation in the light path, is positioned in the partial region of the light path that is selected for the position assigned regulation of irradiance. The temperature distribution of an irradiated upper surface of the measuring object is determined by a temperature detector (50) e.g. thermal camera. An independent claim is also included for a method for production of microelectronic components.