| 摘要 |
PROBLEM TO BE SOLVED: To provide configuration of a contact probe card capable of easily uniform arrangement in a manufacturing process of the contact probe card by being applied to inspection of a minute electronic circuit element arranged in a compact state and comparatively facilitating elastic deformation. SOLUTION: The contact probe card comprises arranging a plurality of recesses 3 at prescribed positions of an insulation substrate, fitting and fixing a spherical probe 1 forming the surface of the recesses 3 of a conductive metal, then, being connected to a conductive connection part 4 on the lower face of the spherical probe 1 in each recess 3, further being connected to an individual measuring terminal 7 provided on the surface of the substrate by the connection part 4 and achieving the above problem on the basis of enabling downward transfer and restoration accompanied by elastic deformation when pushing the front part of the spherical probe 1 to the side of the recesses 3. COPYRIGHT: (C)2006,JPO&NCIPI
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