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发明名称
Method of increasing the capacity of trench capacitors
摘要
申请公布号
EP1164638(A3)
申请公布日期
2006.08.02
申请号
EP20010111880
申请日期
2001.05.16
申请人
INFINEON TECHNOLOGIES AG
发明人
MORHARD, KLAUS-DIETER, DR.;SPERL, IRENE;PENNER, KLAUS
分类号
H01L21/8242
主分类号
H01L21/8242
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代理人
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