| 摘要 |
A non-contact capacitive sensor including: a sensor plate configured to be displaced from a surface and to measure a capacitance of a gap between the surface and sensor plate; an active shield plate over the sensor plate and insulated from said sensor plate, wherein a high frequency input signal is applied to the active shield plate and sensor plate; an effective ground shield plate connected through a first resistor to a ground, over the active shield plate to sandwich the active shield plate between the ground shield plate and the sensor plate, and the ground shield plate is insulated from the active shield plate, and a second resistor connected between the ground shield plate and the active shield plate to provide a direct current (dc) path through the sensor.
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