| 摘要 |
PROBLEM TO BE SOLVED: To efficiently apply mechanical stress toward a channel region from source and drain regions in a thin-line element region by adopting a simple configuration, and to improve carrier mobility. SOLUTION: There are provided: the thin-line element region, where the thin-line source region 8 and the thin-line drain region 9 are arranged while sandwiching a thin-line channel region 4; and a stress generation film 11 or 12 for covering at least the side of each of the thin-line source 8 and thin-line drain region 9 and for generating compressive or tensile stress. COPYRIGHT: (C)2006,JPO&NCIPI
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