Reduced chip testing scheme at wafer level

摘要

The present invention relates to production testing of semiconductor devices, more specifically to production testing of such devices at wafer level. A method according to the present invention comprises the steps of generating ( 20 ) quality test-data at a limited number of semiconductor devices on the wafer, deciding ( 24 ) based on the generated quality test-data whether other semiconductor devices on the wafer are to be tested, and based on the result of the deciding step, testing ( 28 ) or not testing ( 26 ) the other semiconductor devices on the wafer. A corresponding wafer prober is also described.