发明名称 |
MICRO-FEATURE FILL PROCESS AND APPARATUS USING HEXACHLORODISILANE OR OTHER CHLORINE-CONTAINING SILICON PRECURSOR |
摘要 |
<p>A method is provided for depositing a silicon-containing film in a micro-feature on a substrate by a low pressure deposition process in a processing system. A silicon-containing film can be formed in a micro-feature by providing a substrate in a process chamber of a processing system, and exposing a hexachiorodisilane (HCD) process gas to the substrate. A processing tool containing a processing system for forming a silicon-containing film in a micro-feature using a silicon and chlorine-containing gas such as a HCD process gas is provided. Alternatively, the micro-feature can be exposed to DCS, SiCl<SUB>4</SUB>, and SiHCI<SUB>3</SUB> gases. Alternatively, the micro-feature can be exposed to (SiH<SUB>4</SUB> +HCI).</p> |
申请公布号 |
WO2006078354(A2) |
申请公布日期 |
2006.07.27 |
申请号 |
WO2005US43027 |
申请日期 |
2005.11.30 |
申请人 |
TOKYO ELECTRON LIMITED;LEITH, ALLEN;DIP, ANTHONY;OH, SEUNGHO |
发明人 |
LEITH, ALLEN;DIP, ANTHONY;OH, SEUNGHO |
分类号 |
H01L21/8234 |
主分类号 |
H01L21/8234 |
代理机构 |
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代理人 |
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