| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscopic observation device efficiently performing the observation of a substrate by an immersion method by easily and rapidly supervising the progressing conditions of removing liquid which is supplied to the observing points of the substrate. SOLUTION: The microscopic observation device is equipped with: a means 21 supporting the substrate 10A being an observation object, an immersion objective 24; a means 40 generating a focus signal in accordance with the focusing state of the substrate with respect to the focal position of the objective; a means 50 adjusting the relative position of the objective to the substrate based on the focus signal after supplying the liquid between the edge of the objective and the observing point of the substrate, a removing means removing the liquid after finishing the observation of the substrate; and a supervisory means 50 supervising the progressing conditions of removing the liquid based on the focus signal in the midst of removing the liquid by the removing means. COPYRIGHT: (C)2006,JPO&NCIPI
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