| 摘要 |
PROBLEM TO BE SOLVED: To reduce the turn around time (TAT) of a substrate. SOLUTION: Processors A-F are disposed around a main route 1 forming a running track L<SB>1</SB>in the step order of processing a substrate W, substrate transfer units G<SB>1</SB>disposed between the main route 1 and the processors A-F for transferring the substrate W, the substrates W transported one after another by a substrate transport truck M<SB>1</SB>running on the main route 1 are transferred to each processor A-F to do a specified process and the substrate transfer unit G<SB>1</SB>transfers the substrate processed in each processor A-F to an empty substrate transport truck M<SB>1</SB>waiting on the main route 1 to transport to the post-step processors A-F. COPYRIGHT: (C)2006,JPO&NCIPI
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