摘要 |
<p>The invention relates to a micro electromechanical device (1') for tilting a body (2) in two degrees of freedom comprising a carrier element (3) and a membrane (4), the body (2) being connected via the membrane (4) to the carrier element (3), wherein the body (2) and the carrier element (3) each comprise at least one electrode (5,6). The body (2) is tilted by means of electrostatic forces (7) between the at least one electrode (5) of the body (2) and the at least one electrode (6) of the carrier element (3) by an application of a voltage (V<SUB>1</SUB>,V<SUB>2</SUB>) to said electrodes (5,6) from a voltage source.</p> |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V.;MEUWESE, MARK, T.;VAN LIEROP, DIEDERIK;ASJES, RONALD, J.;JANSEN, GERARDUS, L., M.;VAN GRUNSVEN, ERIC, C., E.;BROUWER, DANNIS, M. |
发明人 |
MEUWESE, MARK, T.;VAN LIEROP, DIEDERIK;ASJES, RONALD, J.;JANSEN, GERARDUS, L., M.;VAN GRUNSVEN, ERIC, C., E.;BROUWER, DANNIS, M. |