| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a micro lens having little roughness on the lens surface and has a high numerical aperture. SOLUTION: The method of manufacturing the micro lens of a solid-state imaging device comprises a process wherein a thermal flow lens is formed on a transparent resin layer either directly or indirectly; and a process wherein, with the thermal flow lens as a master block, the pattern of the thermal flow lens is transferred onto the transparent resin layer by dry etching. The dry etching is conducted at the etch rate of 200 nm/min or above and the CD gain value of 260 nm or above, using a C<SB>3</SB>F<SB>8</SB>gas or C<SB>4</SB>F<SB>8</SB>gas of a flow rate of 80 SCCM or above, or mixed gas of these gases. COPYRIGHT: (C)2006,JPO&NCIPI
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