| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable measurements of irradiation uniformity in image forming face on real time, by providing a method and equipment which realize uniformity irradiation measurement and intensity feedback in real-time. <P>SOLUTION: A sample of an irradiation beam is generated, and its sample is projected to a second image forming face. While light-intercepted irradiation beam is projected to the image forming face, irradiation uniformity profile regarding projected sample is measured. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
