发明名称 Verfahren zur Herstellung eines Stabes aus niederohmigem Halbleitermaterial für elektrische Halbleiteranordnungen
摘要 Pure silicon is deposited, e.g. from a gas, on to a rod of silicon containing a doping agent so as substantially to increase the cross-sectional area of the rod whereafter the rod is zone-melted, and optionally stretched. The process of deposition, zone-melting, and stretching may be repeated. The resistivity of the silicon may increase from 0,1 to 100 ohm-cm. p-doping agents specified are aluminium, boron, and gallium. n-doping agents specified are antimony, arsenic, and phosphorus. To effect doping, the rod may be rubbed with boron, or a filament of boron-containing glass applied thereto, and the rod then zone-melted.
申请公布号 CH434213(A) 申请公布日期 1967.04.30
申请号 CH19600009482 申请日期 1960.08.22
申请人 SIEMENS-SCHUCKERTWERKE AKTIENGESELLSCHAFT 发明人 REUSCHEL,KONRAD,DR.;SCHMIDT,OTTO
分类号 C30B13/04;C30B13/10;C30B25/00;D06M13/123;H01L21/00;H01L21/205;(IPC1-7):H01L7/00 主分类号 C30B13/04
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