| 摘要 |
The process comprises the following steps: detection of the passage of an edge of the substrate by a first trigger, detection of the passage of said edge of the substrate at least at a first selected checkpoint on the substrate; control of the presence of the detection of the edge of the substrate at said at least first checkpoint between said detection by said triggers and generation of an integrity check failed message in the absence of the detection of the edge of the substrate at said checkpoint.
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