摘要 |
AN INTEGRATED CIRCUIT INSPECTION MECHANISM IS PROVIDED FOR INSPECTING A PLURALITY OF INTEGRATED CIRCUITS LOADED IN A TRAY MOVED FROM A LOADING AREA OF THE INTEGRATED CIRCUIT INSPECTING MECHANISM TO AN UNLOADING AREA OF THE INTEGRATED CIRCUIT INSPECTION MECHANISM. THE MECHANISM INCLUDES A TRAY- TRANSPORTING DEVICE FOR TRANSPORTING THE TRAY FROM THE LOADING AREA TO THE UNLOADING AREA OF THE INTEGRATED CIRCUIT INSPECTION MECHANISM, AN INSPECTING DEVICE FOR INSPECTING EACH INTEGRATED CIRCUIT TO GENERATE AN INSPECTING SIGNAL, AN IC PICKING-AND- PLACING DEVICE FOR MOVING THE INTEGRATED CIRCUIT TO BE INSPECTED FROM THE TRAY TO THE INSPECTING DEVICE, AND THEN MOVING THE INSPECTED INTEGRATED CIRCUIT FROM THE INSPECTING DEVICE BACK TO THE TRAY, AND A SORTING DEVICE FOR REMOVING A REJECTED INTEGRATED CIRCUIT FROM THE TRAY ACCORDING TO THE INSPECTING SIGNAL.(FIG. 3)
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