MAGNETIC GUIDING APPARATUS, STAGE APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

A magnetic guiding apparatus (100) is provided with a guiding member (110) having a guiding plane (111) provided along a first direction, and a facing plane (121) which faces the guiding plane (111) at a distance from the guiding plane (111). Magnetic attraction is permitted to operate between the guiding plane (111) and the facing plane (121), and while controlling movement to a second direction, which orthogonally intersects with a first direction and is parallel to the guiding plane (111), a mobile body (120) is moved along the first direction. On the guiding plane (111), a first groove section (112) is formed along the first direction, and on the facing plane (121), a second groove section (122) is formed along the first direction so as to face the first groove section (112).