| 摘要 |
PROBLEM TO BE SOLVED: To move a moving substrate not only in x-axis and y-axis directions which are parallel moving directions but also in aθdirection which is a rotational direction while considering compactness and weight reduction. SOLUTION: A driving mechanism includes a fixed substrate 21, a moving substrate 22, and three driving devices 23, 24, 25 which are respectively provided with pins 236, 246, 256 as working parts to be linearly moved. The moving substrate 22 includes first to third slots 221 to 223 as worked parts. Driving force from the pins 235, 246, 256 is respectively received by the first to third slots 221 to 223 to move the moving substrate 22. The pins 236, 246, 256 are guided by the first to third slots 221 to 223 so as to be relatively rotated. COPYRIGHT: (C)2006,JPO&NCIPI
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