| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing unit equipped with high fixed throughput despite of small footprint and low cost. SOLUTION: A washing processing unit 100 which is one embodiment of a processing unit comprises a career placing part 1 for placing a career C wherein wafers are accommodated, a chamber 21 for washing processing of the wafers, and a wafer conveyance 3 for conveying the wafers between a career placing part 1 and the chamber 21. The wafer conveyance 3 is provided with holders 32a and 32b for carrying out/in collectively two or more wafers to the chamber 21, conveyance picks 34a and 34b for conveying wafers one by one, and a robot 31 which can be freely engaged/removed respectively from the conveyance picks 34a and 34b and the holders 32a and 32b, and accessible to the carrier C and the chamber 21. The robot 31 exchanges the conveyance picks 34a and 34b with the holders 32a and 32b so as to convey wafers between the career C and the chamber 21. COPYRIGHT: (C)2006,JPO&NCIPI
|
