| 摘要 |
A fluorine-containing polymer is disclosed which has a functional group and exhibits high transparency over a wide wavelength range. Also disclosed is a resist composition composed of such a fluorine-containing polymer. A fluorine-containing polymer (A) has a monomer unit wherein a fluorine-containing diene represented by the formula (1) below is polymerized. A method for producing the fluorine-containing polymer (A) and a resist composition using the fluorine-containing polymer (A) as the base material are also disclosed. CF2=CFCH2CH-Q-CH 2CH=CH2 (1) In the above formula, Q represents (CH2)aC(CF3)2OR4 (wherein a is an integer of 0-3, and R4 represents an alkyl group having 20 or less carbon atoms which may have an ether oxygen atom, a fluorine-containing alkyl group, an alkoxycarbonyl group having 6 or less carbon atoms, or CH2R5 (wherein R5 is an alkoxycarbonyl group having 6 or less carbon atoms)), or (CH2)dCOOR6 (wherein d is 0 or 1, and R6 represents an hydrogen atom, an alkyl group having 20 or less carbon atoms or a fluorine-containing alkyl group). |
