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发明名称
Spin coating apparatus
摘要
申请公布号
KR100587351(B1)
申请公布日期
2006.06.08
申请号
KR20040003874
申请日期
2004.01.19
申请人
发明人
分类号
G11B7/26
主分类号
G11B7/26
代理机构
代理人
主权项
地址
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