| 摘要 |
Provided is a manufacturing method of a substrate capable of forming a pattern having a relatively narrow width and thick film based on a droplet discharging method. The manufacturing method of a substrate of the present invention is a manufacturing method of a substrate having a patterned functional film, including the steps of: forming a groove pattern on the substrate with laser irradiation; disposing a liquid material along the groove pattern; and heating the liquid material so as to form the functional film. Further, the groove pattern and a liquid repellent film may be combined. By using a liquid material, a highly dense and minute functional film (a wiring pattern for example) can be formed on the substrate.
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