发明名称 |
RADIATION GENERATING DEVICE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY |
摘要 |
<p>A device for generating radiation based on a discharge includes a cathode (33k) and an anode (33a). The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles (31) may be used to supply the material. The cathode and/or anode may form a flat surface. The trajectories (33) of the material may be elongated. A laser (37) may be used to cause the discharge more easily. The laser may be directed on the anode or cathode or on a separate material located in between the anode and cathode.</p> |
申请公布号 |
KR20060050155(A) |
申请公布日期 |
2006.05.19 |
申请号 |
KR20050063573 |
申请日期 |
2005.07.14 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
KOSHELEV KONSTANTIN NIKOLAEVITCH;IVANOV VLADIMIR VITALEVITCH;KOROB EVGENII DMITREEVITCH;ZUKAVISHVILI GIVI GEORGIEVITCH;GAYAZOV ROBERT RAFILEVITCH;KRIVTSUN VLADIMIR MIHAILOVITCH |
分类号 |
H01L21/027;H05G2/00 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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