| 摘要 |
An inertial sensor such as an acceleration sensor or gyro has superior impact resistance by regulating displacement of a weight portion (12) below an upper limit. The sensor includes a sensor portion that has a fixing part (14), the weight portion (12) the height of which is a predetermined size shorter than that of the fixing part, and a beam portion (13) that links the weight portion and the fixing part; a plate-like first stopper portion (15) that covers the weight portion (12) and is bonded to the fixing part with clearance of a predetermined size from the weight portion; and a flat, plate-like second stopper portion (16) that is connected to the fixing part (14) via a bump (17) of a predetermined height on a side of the weight portion opposite to the first stopper portion. |
