发明名称 |
Method of recycling fluorine using an adsorption purification process |
摘要 |
<p>A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine source and the adsorbent bed. Fluorine derived preferably from a nitrogen trifluoride source and used to remove deposited silicon-containing impurities in reaction chambers is reclaimed from an adsorbent bed, and made available to the reaction chamber as a supplemental fluorine source to reduce the total required amount of nitrogen trifluoride source gas. The separation column adsorbent is regenerated in cyclical intervals using a reverse flow of inert gas. <IMAGE></p> |
申请公布号 |
SG120928(A1) |
申请公布日期 |
2006.04.26 |
申请号 |
SG20030002565 |
申请日期 |
2003.04.30 |
申请人 |
THE BOC GROUP, INC. |
发明人 |
EZELL EDWARD FREDERICK;HOGLE, RICHARD, A.;WHITLOCK, WALTER, H.;MCFARLANE, GRAHAM, A. |
分类号 |
B01D53/68;B01D53/04;B01J20/20;B01J20/28;B08B7/00;C01B7/20;C23C16/44;H01L21/311;(IPC1-7):C23C16/44 |
主分类号 |
B01D53/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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