| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for easily photographing a reliable double exposure image, when measuring the information limit of a transmission type electron microscope by using a Young's fringe method. SOLUTION: Conditions required for Young's fringe method photographing are stored in a storage 26 in advance. When the Young's fringe method photographing is selected, conditions required for photographing, such as the amount of the deviation of an electron microscope image, an exposure time, and the number of repetitions of deflection, are read from the storage 26 and are set to the device. A deflection coil 9 is controlled based on the photographing conditions, and the Young's fringe method photographing is performed automatically. COPYRIGHT: (C)2006,JPO&NCIPI
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