| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a master for an optical information recording medium for preparing optical information recording medium, in which short pits having a pit length smaller than the pit width are contained, and a sufficient modulation level is secured, when linear density is increased. <P>SOLUTION: A manufacturing method has a step where an electron beam 19, deflected in approximately perpendicular direction to the tracking direction of a master 21 is converged to an electron-beam sensitive resist thin film, applied to the surface of a master 21 which is rotated, while being moved in a radial direction by a rotating stage 22 and a moving stage 23, so that the latent image of recess/projection pits, disposed in a spiral or concentric manner, is formed. Thus, a latent image of recess/projection pits containing shortest pits, in a form where pit length is smaller than pit width, is formed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
