| 摘要 |
The invention relates to a device which comprises at least one electric arc source (1) fastened to a board (3) in a vacuum-tight manner together with a possibly required ignition device (2). A plurality of sources can be fastened on the board (3). The board (3) is linked with a vacuum-tight, aerated vessel (4) in a vacuum-tight manner, preferably it is sealed and screwed by means of a vacuum seal ring. The vessel (4) is linked with an opening in the vacuum chamber via an aerated, vacuum-tight connection (5) in a vacuum-tight manner. |
