| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray detector 1 which reduces the effect of a substrate on a polycrystal layer 21 in a photoelectric conversion film 4 and offers the photoelectric conversion film 4 having homogeneous and fine properties. SOLUTION: According to the X-ray detector 1, an amorphous layer 20 and the polycrystal layer 21 are formed in increasing order on the lower electrode 9 of a TFT board 3 to form the photoelectric conversion film 4 of a multilayer structure. The amorphous layer 20 cancels level difference on the surface of the TFT board 3, and prevents the properties of the substrate, especially crystallizability, from affecting the polycrystal layer 21. Since the photoelectric conversion film 4 of the multilayer structure is formed on the lower electrode 9 of the TFT board 3, the effect of the substrate on the polycrystal layer 21 in the photoelectric conversion film 4 is reduced to offer the photoelectric conversion film 4 having homogeneous and fine properties. COPYRIGHT: (C)2006,JPO&NCIPI
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