发明名称 PIEZOELECTRIC VIBRATION CHIP AND PIEZOELECTRIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric vibration chip having a reduced CI value for miniaturization without degrading a vibration characteristic, and to provide a piezoelectric device using such the piezoelectric vibrating reed. SOLUTION: The piezoelectric vibration chip includes a base 51 formed of a piezoelectric material, vibrating arms 35, 36 integrally formed with the base which are mutually extending in parallel, long grooves 33, 34 formed along the longitudinal direction of each vibrating arm, and drive electrodes being formed on the long grooves. The width size of each vibrating arm becomes gradually narrower from the base side to the tip side. On the tip side, there is a change point P in which the width size becomes increased. The above change point P is positioned further on the arm tip side than the tips of the long grooves, and a maximum/minimum value M of the width reduction ratio of the above vibrating arm is determined by the relationship between M and the ratio N of a long groove length PL to a vibrating arm length L. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006094154(A) 申请公布日期 2006.04.06
申请号 JP20040277293 申请日期 2004.09.24
申请人 SEIKO EPSON CORP 发明人 TANAYA HIDEO
分类号 H03H9/19;H01L41/09;H01L41/18;H03H9/215 主分类号 H03H9/19
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