| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card enabling an analog IC to be measured by a tester for a digital IC in a development stage of a semiconductor device. SOLUTION: The probe card 12 comprises an analog signal producing means 16 for producing an input analog signal for input, an impedance matching means 18 for suppressing the attenuation of the input analog signal, an analog signal input means that is arranged on a measured object facing surface and inputs the input analog signal to a measured object 100, an analog signal acquiring means that is arranged on a measured object facing surface and acquires an output analog signal outputted by the measured object 100, an analog/digital conversion means 24 for converting the output analog signal into a digital signal capable of being processed by a digital tester, and a digital signal transmitting means for transmitting the digital signal produced by conversion by the analog/digital conversion means 24 to the digital tester 30. COPYRIGHT: (C)2006,JPO&NCIPI
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