| 摘要 |
A Y slider (302) extending in an X-axis direction can move in a Y-axis direction by a Y linear motor. An X slider (303) loaded with a fine movement stage can be guided by a Y slider to move in an X-axis direction by an X linear motor. At least a pair of Y electromagnets (101) are provided to the X slider to oppose guide surfaces of the Y slider. A Y attracting plate (102) is provided to each guide surface of the Y slider. The pair of Y electromagnets generate attracting forces in opposite directions along the Y-axis direction between the X and Y sliders. Thus, the X and Y sliders can be kept in noncontact with each other. When the Y slider is to move in the Y-axis direction, an appropriate accelerating force can be applied to the X slider. |
