| 摘要 |
PROBLEM TO BE SOLVED: To provide a porous structure capable of being reduced in production cost and improved in production yield. SOLUTION: The porous structure has a porous structure, and is provided with an aluminum oxide film 2 in which an element (oxygen) capable of reducing the toughness of aluminum is incorporated into the region 2a near the surface. Then, the content of the element (oxygen) in the region 2a near the surface of the aluminum oxide film is higher than the content of the element (oxygen) in the region other than the region 2a near the surface of the aluminum oxide film 2. COPYRIGHT: (C)2006,JPO&NCIPI
|
